Equipments in TFT LCD, LED factory

※ Mechanical seals　※ Pumps　※ Valves

※ Connectors　※ Stirrers　※ Pipe fittings

‧ Static or finite dynamics (O-ring)

‧ Fairly low pressure (O-ring)

‧ Wide temperature range

‧ Resistance to chemicals, diffusion equipment

‧ Less overflowing gas

※ Dry process: Chemical vapor deposition, etch

Equipment: TEL, ULVAC, AKT

※ Wet process equipment: Develop, etch, clean equipment

DNS、DMS、Shibarura、Manz、SPP。